Nanofacilities
Many facilities for nanofabrication and characterisation are available. The Oregon Nanoscience and Microtechnologies Institute (ONAMI) supports several of these.
- Minot Lab - includes a carbon nanotube growth furnace (1" diameter). Graphene/CNT growth furnace (4" diameter). Scanning probe microscopy in air and liquid (Asylum MFP-3d). Spectrally-resolved scanning photocurrent microscope. Ebeam/thermal metal deposition system.
- OSU clean room - includes direct write laser lithography, contact aligners for photolithography, thin-film deposition & processing, and photoresist processing. The clean room is part of the ONAMI network.
- OSU Electron Microscopy and Imaging Facility - includes an FEI Quanta 3D Dual Beam FIB Scanning Electron Microscope, an FEI Quanta 600 Environmental Scanning Electron Microscope and a Philips CM12 Transmission Electron Microscope. Nabity ebeam lithography system. The facility director is Dr. Yi Liu.
- Rorrer Lab, Scanning micro-Raman spectroscopy system.
- Conley lab, Atomic Layer Deposition.
- Gibbons Lab, Thermal evaporators and sputtering systems.
- Koretsky Lab, Sputtering systems.
- CAMCOR at University of Oregon, includes E-beam lithography/microscopy using a Zeiss Ultra SEM with Nabity lithography system.
- Electron Microscopy Center at Portland State University, includes TEM and FIB.